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    Characteristics of SiOX thin films deposited by atmospheric pressure chemical vapor deposition using a double-discharge system

    New search for: Park, J.
    New search for: Oh, J.
    New search for: Gil, E.
    New search for: Yeom, G.Y.
    New search for: Boo, J.-H.
    New search for: Ahn, H.

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    Characteristics of SiOX thin films deposited by atmospheric pressure chemical vapor deposition using a double-discharge system

    New search for: Park, J.
    New search for: Oh, J.
    New search for: Gil, E.
    New search for: Yeom, G.Y.
    New search for: Boo, J.-H.
    New search for: Ahn, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characteristics of SiOX thin films deposited by atmospheric pressure chemical vapor deposition using a double-discharge system

    New search for: Park, J.
    New search for: Oh, J.
    New search for: Gil, E.
    New search for: Yeom, G.Y.
    New search for: Boo, J.-H.
    New search for: Ahn, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characteristics of SiOX thin films deposited by atmospheric pressure chemical vapor deposition using a double-discharge system

    Contributors:

    Park, J. (author) / Oh, J. (author) / Gil, E. (author) / Yeom, G.Y. (author) / Boo, J.-H. / Ahn, H.

    Published in:

    Proceedings of the IFFM2011 (2011 International Forum on Functional Materials) and AFM-2 (2nd Special Symposium on Advances in Functional Materials) Jeju island, Korea 28-31 July 2011 ; 3011-3014

    MATERIALS RESEARCH BULLETIN ; 47

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0025-5408

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11 / 620

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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