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    Atomic layer deposition of TiO2 thin films from TiI4 and H2O

    New search for: Aarik, J.
    New search for: Aidla, A.
    New search for: Uustare, T.
    New search for: Kukli, K.
    New search for: Sammelselg, V.
    New search for: Ritala, M.
    New search for: Leskela, M.

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    Atomic layer deposition of TiO2 thin films from TiI4 and H2O

    New search for: Aarik, J.
    New search for: Aidla, A.
    New search for: Uustare, T.
    New search for: Kukli, K.
    New search for: Sammelselg, V.
    New search for: Ritala, M.
    New search for: Leskela, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Atomic layer deposition of TiO2 thin films from TiI4 and H2O

    New search for: Aarik, J.
    New search for: Aidla, A.
    New search for: Uustare, T.
    New search for: Kukli, K.
    New search for: Sammelselg, V.
    New search for: Ritala, M.
    New search for: Leskela, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Atomic layer deposition of TiO2 thin films from TiI4 and H2O

    Contributors:

    Aarik, J. (author) / Aidla, A. (author) / Uustare, T. (author) / Kukli, K. (author) / Sammelselg, V. (author) / Ritala, M. (author) / Leskela, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 193 ; 277-286

    Publication date:

    2002-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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