DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII: Fid-Bau Portal

DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII

Ma, F. / Chen, Q. / Cai, X. / Li, G. / Ma, H.

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DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII

Ma, F. / Chen, Q. / Cai, X. / Li, G. / Ma, H.

DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII

Ma, F. / Chen, Q. / Cai, X. / Li, G. / Ma, H.

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Document information

Title:

DLC Film Fabricated by a Composite Technique of Unbalanced Magnetron Sputtering and PIII

Contributors:

Ma, F. (author) / Chen, Q. (author) / Cai, X. (author) / Li, G. (author) / Ma, H. (author)

Published in:

MATERIALS TRANSACTIONS ; 43 ; 1398-1402

Publication date:

2002-01-01

Size:

5 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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