Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique: Fid-Bau Portal

Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

Ma, F. / Li, G. / Li, H. / Ma, H. / Cai, X.

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Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

Ma, F. / Li, G. / Li, H. / Ma, H. / Cai, X.

Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

Ma, F. / Li, G. / Li, H. / Ma, H. / Cai, X.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

Contributors:

Ma, F. (author) / Li, G. (author) / Li, H. (author) / Ma, H. (author) / Cai, X. (author)

Published in:

MATERIALS LETTERS ; 57 ; 82-86

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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