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Evolution of Surface Morphologies in Sputtered and Electroplated Cu Films during Thermal Cycling
Evolution of Surface Morphologies in Sputtered and Electroplated Cu Films during Thermal Cycling
Evolution of Surface Morphologies in Sputtered and Electroplated Cu Films during Thermal Cycling
Hwang, S.-J. (author) / Park, H. (author) / Lee, J.-H. (author) / Oh, K. H. (author) / Joo, Y.-C. (author) / Lee, D. N.
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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