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Residual free reactive ion etching of the Bell contact Ti/Pt/Au
Residual free reactive ion etching of the Bell contact Ti/Pt/Au
Residual free reactive ion etching of the Bell contact Ti/Pt/Au
Franz, G. (author) / Kachel, R. (author) / Sotier, S. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 45-50
2002-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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