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Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching
Zhang, H. (author) / Amro, N. A. (author) / Disawal, S. (author) / Elghanian, R. (author) / Shile, R. (author) / Fragala, J. (author)
APPLIED SURFACE SCIENCE ; 253 ; 1960-1963
2006-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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