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Systematic study of amorphous hydrogenated and fluorinated carbon films

Lamperti, A. / Ossi, P. M.

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Systematic study of amorphous hydrogenated and fluorinated carbon films

Lamperti, A. / Ossi, P. M.

Systematic study of amorphous hydrogenated and fluorinated carbon films

Lamperti, A. / Ossi, P. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Systematic study of amorphous hydrogenated and fluorinated carbon films

Contributors:

Lamperti, A. (author) / Ossi, P. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 205 ; 113-120

Publication date:

2003-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Formation of porosity in sputtered amorphous hydrogenated carbon films

Yin, Y. / Collins, R. E. / Zhang, Q.-C. | British Library Online Contents | 1994