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Simulation of SiO2 build-up in silicon under oxygen bombardment

Guzman, B. / Serrano, J. J. / Blanco, J. M. / Aguilar, M. / Ameziane, O.

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Simulation of SiO2 build-up in silicon under oxygen bombardment

Guzman, B. / Serrano, J. J. / Blanco, J. M. / Aguilar, M. / Ameziane, O.

Simulation of SiO2 build-up in silicon under oxygen bombardment

Guzman, B. / Serrano, J. J. / Blanco, J. M. / Aguilar, M. / Ameziane, O.

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Check availability in my library

Order at Subito €

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Document information

Title:

Simulation of SiO2 build-up in silicon under oxygen bombardment

Contributors:

Guzman, B. (author) / Serrano, J. J. (author) / Blanco, J. M. (author) / Aguilar, M. (author) / Ameziane, O. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 139-142

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Doubly versus singly positively charged oxygen ions back-scattered from a silicon surface under dynamic O2+ bombardment

Franzreb, K. / Williams, P. / Lorincik, J. et al. | British Library Online Contents | 2003

Segregation under low-energy oxygen bombardment in the near-surface region

Tada, Y. / Suzuki, K. / Kataoka, Y. | British Library Online Contents | 2008