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Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

Tomita, M. / Suzuki, M. / Tachibe, T. / Kozuka, S. / Murakoshi, A.

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Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

Tomita, M. / Suzuki, M. / Tachibe, T. / Kozuka, S. / Murakoshi, A.

Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

Tomita, M. / Suzuki, M. / Tachibe, T. / Kozuka, S. / Murakoshi, A.

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Check availability in my library

Order at Subito €

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Document information

Title:

Estimation of ultra-shallow implants using SIMS, NRA and chemical analysis

Contributors:

Tomita, M. (author) / Suzuki, M. (author) / Tachibe, T. (author) / Kozuka, S. (author) / Murakoshi, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 377-382

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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