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Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices

Zanderigo, F. / Brazzelli, D. / Rocca, S. / Pregnolato, A. / Grossi, A. / Queirolo, G.

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Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices

Zanderigo, F. / Brazzelli, D. / Rocca, S. / Pregnolato, A. / Grossi, A. / Queirolo, G.

Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices

Zanderigo, F. / Brazzelli, D. / Rocca, S. / Pregnolato, A. / Grossi, A. / Queirolo, G.

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Check availability in my library

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Document information

Title:

Gate oxide properties investigated by TOF-SIMS profiles on CMOS devices

Contributors:

Zanderigo, F. (author) / Brazzelli, D. (author) / Rocca, S. (author) / Pregnolato, A. (author) / Grossi, A. (author) / Queirolo, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 437-440

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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