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SIMS depth profiling of advanced gate dielectric materials
SIMS depth profiling of advanced gate dielectric materials
SIMS depth profiling of advanced gate dielectric materials
Bennett, J. (author) / Gondran, C. (author) / Sparks, C. (author) / Hung, P. Y. (author) / Hou, A. (author)
APPLIED SURFACE SCIENCE ; 203-204 ; 409-413
2003-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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