SIMS depth profiling of advanced gate dielectric materials: Fid-Bau Portal

SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. / Hung, P. Y. / Hou, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. / Hung, P. Y. / Hou, A.

SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. / Hung, P. Y. / Hou, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

SIMS depth profiling of advanced gate dielectric materials

Contributors:

Bennett, J. (author) / Gondran, C. (author) / Sparks, C. (author) / Hung, P. Y. (author) / Hou, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 409-413

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Similar titles

TOF-SIMS depth profiling of SIMON

Xin, G. / Dong, G. / Xu, C. et al. | British Library Online Contents | 2003

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

SIMS depth profiling of working environment nanoparticles

Konarski, P. / Iwanejko, I. / Mierzejewska, A. | British Library Online Contents | 2003

SIMS depth profiling and TEM imaging of the SIMS altered layer

Christofi, A. / Walker, J. F. / McPhail, D. S. | British Library Online Contents | 2008

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003