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SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. / Hung, P. Y. / Hou, A.

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SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. / Hung, P. Y. / Hou, A.

SIMS depth profiling of advanced gate dielectric materials

Bennett, J. / Gondran, C. / Sparks, C. / Hung, P. Y. / Hou, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

SIMS depth profiling of advanced gate dielectric materials

Contributors:

Bennett, J. (author) / Gondran, C. (author) / Sparks, C. (author) / Hung, P. Y. (author) / Hou, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 409-413

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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