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    Effects of process variables on properties and composition of a-Si:C:H films

    New search for: Moskowitz, I. L.
    New search for: Lanford, W. A.
    New search for: Babu, S. V.

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    Effects of process variables on properties and composition of a-Si:C:H films

    New search for: Moskowitz, I. L.
    New search for: Lanford, W. A.
    New search for: Babu, S. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of process variables on properties and composition of a-Si:C:H films

    New search for: Moskowitz, I. L.
    New search for: Lanford, W. A.
    New search for: Babu, S. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effects of process variables on properties and composition of a-Si:C:H films

    Contributors:

    Moskowitz, I. L. (author) / Lanford, W. A. (author) / Babu, S. V. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 18 ; 129-138

    Publication date:

    2003-01-01

    Size:

    10 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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