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    Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtered Gallium Nitride Films

    New search for: Kusaka, K.
    New search for: Furutani, K.
    New search for: Kikuma, T.
    New search for: Hanabusa, T.
    New search for: Tominaga, K.

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    Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtered Gallium Nitride Films

    New search for: Kusaka, K.
    New search for: Furutani, K.
    New search for: Kikuma, T.
    New search for: Hanabusa, T.
    New search for: Tominaga, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtered Gallium Nitride Films

    New search for: Kusaka, K.
    New search for: Furutani, K.
    New search for: Kikuma, T.
    New search for: Hanabusa, T.
    New search for: Tominaga, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Effect of Plasma Protection Net on Crystal Orientation and Residual Stress in Sputtered Gallium Nitride Films

    Contributors:

    Kusaka, K. (author) / Furutani, K. (author) / Kikuma, T. (author) / Hanabusa, T. (author) / Tominaga, K. (author)

    Published in:

    MATERIALS SCIENCE RESEARCH INTERNATIONAL ; 8 ; 187-192

    Publication date:

    2002-01-01

    Size:

    6 pages

    ISSN:

    1341-1683

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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