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    X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films

    New search for: Akiniwa, Y.
    New search for: Sakaue, T.
    New search for: Chandra, T.
    New search for: Ionescu, M.
    New search for: Mantovani, D.

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    X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films

    New search for: Akiniwa, Y.
    New search for: Sakaue, T.
    New search for: Chandra, T.
    New search for: Ionescu, M.
    New search for: Mantovani, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films

    New search for: Akiniwa, Y.
    New search for: Sakaue, T.
    New search for: Chandra, T.
    New search for: Ionescu, M.
    New search for: Mantovani, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    X-Ray Measurement of Residual Stress Distribution in Sputtered Cu Thin Films

    Contributors:

    Akiniwa, Y. (author) / Sakaue, T. (author) / Chandra, T. / Ionescu, M. / Mantovani, D.

    Published in:

    THERMEC 2011 ; 1649-1654

    MATERIALS SCIENCE FORUM ; 706/709

    Publication date:

    2012-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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