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    Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

    New search for: Kusaka, K.
    New search for: Hanabusa, T.
    New search for: Tominaga, K.
    New search for: Yamauchi, N.
    New search for: Denis, S.
    New search for: Hanabusa, T.
    New search for: He, B.
    New search for: Mittemeijer, E.
    New search for: Nan, J.
    New search for: Noyan, I. C.
    New search for: Scholtes, B.
    New search for: Tanaka, K.
    New search for: Xu, K.

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    Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

    New search for: Kusaka, K.
    New search for: Hanabusa, T.
    New search for: Tominaga, K.
    New search for: Yamauchi, N.
    New search for: Denis, S.
    New search for: Hanabusa, T.
    New search for: He, B.
    New search for: Mittemeijer, E.
    New search for: Nan, J.
    New search for: Noyan, I. C.
    New search for: Scholtes, B.
    New search for: Tanaka, K.
    New search for: Xu, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

    New search for: Kusaka, K.
    New search for: Hanabusa, T.
    New search for: Tominaga, K.
    New search for: Yamauchi, N.
    New search for: Denis, S.
    New search for: Hanabusa, T.
    New search for: He, B.
    New search for: Mittemeijer, E.
    New search for: Nan, J.
    New search for: Noyan, I. C.
    New search for: Scholtes, B.
    New search for: Tanaka, K.
    New search for: Xu, K.

    Access

    Access via TIB
    Check availability in my library
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    Access

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    Document information
    Title:

    Effect of Substrate Temperature on Crystal Orientation and Residual Stress in RF Sputtered Gallium Nitride Films

    Contributors:

    Kusaka, K. (author) / Hanabusa, T. (author) / Tominaga, K. (author) / Yamauchi, N. (author) / Denis, S. / Hanabusa, T. / He, B. / Mittemeijer, E. / Nan, J. / Noyan, I. C.

    Published in:

    Residual Stresses VII ICRS 7 Proceedings of the 7^t^h International Conference on Residual Stresses, ICRS-7 Xi'an, China, 14-17 June 2004 ; 613-618

    MATERIALS SCIENCE FORUM ; 490/491

    Publication date:

    2005-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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