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Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

Valentini, L. / Kenny, J. M. / Montereali, R. M. / Lozzi, L. / Santucci, S.

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Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

Valentini, L. / Kenny, J. M. / Montereali, R. M. / Lozzi, L. / Santucci, S.

Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

Valentini, L. / Kenny, J. M. / Montereali, R. M. / Lozzi, L. / Santucci, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

Contributors:

Valentini, L. (author) / Kenny, J. M. (author) / Montereali, R. M. (author) / Lozzi, L. (author) / Santucci, S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 271-277

Publication date:

2002-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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