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Mechanism of flat band voltage shift of organic material with low dielectric constant for ULSI interconnection
Mechanism of flat band voltage shift of organic material with low dielectric constant for ULSI interconnection
Mechanism of flat band voltage shift of organic material with low dielectric constant for ULSI interconnection
Chang, C. L. (author) / Huang, T. J. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 98 ; 45-53
2003-01-01
9 pages
Article (Journal)
English
DDC:
620.11
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