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Chemical Mechanical Polishing of Silica Dielectric in ULSI Manufacturing

Tan, B.-m. / Liu, Y.-l. / Lian, J.

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Chemical Mechanical Polishing of Silica Dielectric in ULSI Manufacturing

Tan, B.-m. / Liu, Y.-l. / Lian, J.

Chemical Mechanical Polishing of Silica Dielectric in ULSI Manufacturing

Tan, B.-m. / Liu, Y.-l. / Lian, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemical Mechanical Polishing of Silica Dielectric in ULSI Manufacturing

Contributors:

Tan, B.-m. (author) / Liu, Y.-l. (author) / Lian, J. (author)

Published in:

JOURNAL- HEBEI UNIVERSITY OF TECHNOLOGY ; 30 ; 32-36

Publication date:

2001-01-01

Size:

5 pages

ISSN:

1007-2373

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620

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