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Applications of laser lithography on oxide film to titanium micromachining

Chauvy, P. F. / Hoffmann, P. / Landolt, D.

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Applications of laser lithography on oxide film to titanium micromachining

Chauvy, P. F. / Hoffmann, P. / Landolt, D.

Applications of laser lithography on oxide film to titanium micromachining

Chauvy, P. F. / Hoffmann, P. / Landolt, D.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Applications of laser lithography on oxide film to titanium micromachining

Contributors:

Chauvy, P. F. (author) / Hoffmann, P. (author) / Landolt, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 165-170

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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