E-MRS Spring Meeting 2002. The 300mm Silicon Era: Material, Equipment, Technology: Fid-Bau Portal

E-MRS Spring Meeting 2002. The 300mm Silicon Era: Material, Equipment, Technology

Richter, H. / Umeno, M. / Wagner, P.

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E-MRS Spring Meeting 2002. The 300mm Silicon Era: Material, Equipment, Technology

Richter, H. / Umeno, M. / Wagner, P.

E-MRS Spring Meeting 2002. The 300mm Silicon Era: Material, Equipment, Technology

Richter, H. / Umeno, M. / Wagner, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

E-MRS Spring Meeting 2002. The 300mm Silicon Era: Material, Equipment, Technology

Contributors:

Richter, H. (author) / Umeno, M. (author) / Wagner, P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 311

Publication date:

2002-01-01

Size:

311 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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