E-MRS Spring Meeting 2002. The 300mm Silicon Era: Material, Equipment, Technology

Richter, H. / Umeno, M. / Wagner, P. | British Library Online Contents | 2002

Defect requirements for advanced 300mm DRAM substrates

Kupfer, C. / Roth, H. / Dietrich, H. | British Library Online Contents | 2002

Doubleside polishing-a technology mandatory for 300mm wafer manufacturing

Wenski, G. / Altmann, T. / Winkler, W. et al. | British Library Online Contents | 2002

Oxide precipitates in annealed nitrogen-doped 300mm CZ-SI

Akhmetov, V. D. / Richter, H. / Lysytskiy, O. et al. | British Library Online Contents | 2002

Design and Construction Issues for 300mm Semiconductor Manufacturing Facilities

Merchant, S. / Chasey, A. / American Society of Civil Engineers | British Library Conference Proceedings | 2000