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Doubleside polishing-a technology mandatory for 300mm wafer manufacturing

Wenski, G. / Altmann, T. / Winkler, W. / Heier, G. / Holker, G.

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Doubleside polishing-a technology mandatory for 300mm wafer manufacturing

Wenski, G. / Altmann, T. / Winkler, W. / Heier, G. / Holker, G.

Doubleside polishing-a technology mandatory for 300mm wafer manufacturing

Wenski, G. / Altmann, T. / Winkler, W. / Heier, G. / Holker, G.

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Check availability in my library

Order at Subito €

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Document information

Title:

Doubleside polishing-a technology mandatory for 300mm wafer manufacturing

Contributors:

Wenski, G. (author) / Altmann, T. (author) / Winkler, W. (author) / Heier, G. (author) / Holker, G. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 375-380

Publication date:

2002-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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