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Design and control of porosity in oxide thin films grown by PECVD
Design and control of porosity in oxide thin films grown by PECVD
Design and control of porosity in oxide thin films grown by PECVD
Borrás, A. (author) / Barranco, A. (author) / González-Elipe, A. R. (author)
JOURNAL OF MATERIALS SCIENCE ; 41 ; 5220-5226
2006-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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