Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components: Fid-Bau Portal

Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

Kim, Y. S. / Yang, S. H. / Kim, C. I. / Lee, S. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

Kim, Y. S. / Yang, S. H. / Kim, C. I. / Lee, S. S.

Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

Kim, Y. S. / Yang, S. H. / Kim, C. I. / Lee, S. S.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Molecular Dynamic Simulation of AFM-Based Nano Lithography Process for Fabrication of MEMS Components

Contributors:

Kim, Y. S. (author) / Yang, S. H. (author) / Kim, C. I. (author) / Lee, S. S. (author)

Published in:

MATERIALS SCIENCE FORUM ; 426/432 ; 2243-2248

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Wang, H. T. / Xie, Z. P. / Yang, W. Y. et al. | British Library Online Contents | 2007

Fabrication of optical components by laser lithography

Dresel, T. / Schwider, J. | British Library Online Contents | 1996

Mechanical Behavior Simulation of PMMA for Nano Imprint Lithography Using Molecular Dynamics

Kim, J. Y. / Kim, J. H. / Choi, B. I. | British Library Online Contents | 2007

Fabrication of Nano-Sized Gold Dot Array Using Bi-Layer Nano Imprint Lithography

Yang, K. Y. / Hong, S. H. / Lee, H. et al. | British Library Online Contents | 2006

Fabrication of PDMS Nano-Stamp by Replicating Si Nano-Moulds Fabricated by Interference Lithography

Byun, I. / Park, J.H. / Kim, J.W. et al. | British Library Online Contents | 2012