Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering: Fid-Bau Portal

Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering

Miao, L. / Jin, P. / Kaneko, K. / Terai, A. / Nabatova-Gabain, N. / Tanemura, S.

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Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering

Miao, L. / Jin, P. / Kaneko, K. / Terai, A. / Nabatova-Gabain, N. / Tanemura, S.

Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering

Miao, L. / Jin, P. / Kaneko, K. / Terai, A. / Nabatova-Gabain, N. / Tanemura, S.

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Title:

Preparation and characterization of polycrystalline anatase and rutile TiO2 thin films by rf magnetron sputtering

Contributors:

Miao, L. (author) / Jin, P. (author) / Kaneko, K. (author) / Terai, A. (author) / Nabatova-Gabain, N. (author) / Tanemura, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 212-213 ; 255-263

Publication date:

2003-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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