Optical properties of polycrystalline and epitaxial anatase and rutile TiO2 thin films by rf magnetron sputtering: Fid-Bau Portal

Optical properties of polycrystalline and epitaxial anatase and rutile TiO2 thin films by rf magnetron sputtering

Tanemura, S. / Miao, L. / Jin, P. / Kaneko, K. / Terai, A. / Nabatova-Gabain, N.

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Optical properties of polycrystalline and epitaxial anatase and rutile TiO2 thin films by rf magnetron sputtering

Tanemura, S. / Miao, L. / Jin, P. / Kaneko, K. / Terai, A. / Nabatova-Gabain, N.

Optical properties of polycrystalline and epitaxial anatase and rutile TiO2 thin films by rf magnetron sputtering

Tanemura, S. / Miao, L. / Jin, P. / Kaneko, K. / Terai, A. / Nabatova-Gabain, N.

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Document information

Title:

Optical properties of polycrystalline and epitaxial anatase and rutile TiO2 thin films by rf magnetron sputtering

Contributors:

Tanemura, S. (author) / Miao, L. (author) / Jin, P. (author) / Kaneko, K. (author) / Terai, A. (author) / Nabatova-Gabain, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 212-213 ; 654-660

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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