SIMS characterization of hydrogen transport through SiO2 by low-temperature hydrogen annealing: Fid-Bau Portal

SIMS characterization of hydrogen transport through SiO2 by low-temperature hydrogen annealing

Kawashima, Y. / Liu, Z. / Terashima, K. / Hamada, K. / Fukutani, K. / Wilde, M. / Aoyagi, S. / Kudo, M.

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SIMS characterization of hydrogen transport through SiO2 by low-temperature hydrogen annealing

Kawashima, Y. / Liu, Z. / Terashima, K. / Hamada, K. / Fukutani, K. / Wilde, M. / Aoyagi, S. / Kudo, M.

SIMS characterization of hydrogen transport through SiO2 by low-temperature hydrogen annealing

Kawashima, Y. / Liu, Z. / Terashima, K. / Hamada, K. / Fukutani, K. / Wilde, M. / Aoyagi, S. / Kudo, M.

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Order at Subito €

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Document information

Title:

SIMS characterization of hydrogen transport through SiO2 by low-temperature hydrogen annealing

Contributors:

Kawashima, Y. (author) / Liu, Z. (author) / Terashima, K. (author) / Hamada, K. (author) / Fukutani, K. (author) / Wilde, M. (author) / Aoyagi, S. (author) / Kudo, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 212-213 ; 804-808

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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