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Built-in interface in high-k gate stacks

Hiratani, M. / Torii, K. / Shimamoto, Y. / Saito, S. I.

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Built-in interface in high-k gate stacks

Hiratani, M. / Torii, K. / Shimamoto, Y. / Saito, S. I.

Built-in interface in high-k gate stacks

Hiratani, M. / Torii, K. / Shimamoto, Y. / Saito, S. I.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Built-in interface in high-k gate stacks

Contributors:

Hiratani, M. (author) / Torii, K. (author) / Shimamoto, Y. (author) / Saito, S. I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 216 ; 208-214

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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