XPS, AFM and nanoindentation studies of Ti1-xAlxN films synthesized by reactive unbalanced magnetron sputtering: Fid-Bau Portal

XPS, AFM and nanoindentation studies of Ti1-xAlxN films synthesized by reactive unbalanced magnetron sputtering

Shum, P. W. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G.

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XPS, AFM and nanoindentation studies of Ti1-xAlxN films synthesized by reactive unbalanced magnetron sputtering

Shum, P. W. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G.

XPS, AFM and nanoindentation studies of Ti1-xAlxN films synthesized by reactive unbalanced magnetron sputtering

Shum, P. W. / Zhou, Z. F. / Li, K. Y. / Shen, Y. G.

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Check availability in my library

Order at Subito €

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Document information

Title:

XPS, AFM and nanoindentation studies of Ti1-xAlxN films synthesized by reactive unbalanced magnetron sputtering

Contributors:

Shum, P. W. (author) / Zhou, Z. F. (author) / Li, K. Y. (author) / Shen, Y. G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 100 ; 204-213

Publication date:

2003-01-01

Size:

10 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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