SiC Crystal Growth by HTCVD: Fid-Bau Portal

SiC Crystal Growth by HTCVD

Ellison, A. / Magnusson, B. / Sundqvist, B. / Pozina, G. / Bergman, J. P. / Janzen, E. / Vehanen, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

SiC Crystal Growth by HTCVD

Ellison, A. / Magnusson, B. / Sundqvist, B. / Pozina, G. / Bergman, J. P. / Janzen, E. / Vehanen, A.

SiC Crystal Growth by HTCVD

Ellison, A. / Magnusson, B. / Sundqvist, B. / Pozina, G. / Bergman, J. P. / Janzen, E. / Vehanen, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

SiC Crystal Growth by HTCVD

Contributors:

Ellison, A. (author) / Magnusson, B. (author) / Sundqvist, B. (author) / Pozina, G. (author) / Bergman, J. P. (author) / Janzen, E. (author) / Vehanen, A. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 9-14

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ellison, A. / Magnusson, B. / Son, N. T. et al. | British Library Online Contents | 2003

SiC HTCVD Simulation Modified by Sublimation Etching

Kitou, Y. / Makino, E. / Ikeda, K. et al. | British Library Online Contents | 2006

Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Sundqvist, B. / Ellison, A. / Jonsson, A. et al. | British Library Online Contents | 2003

Observation of Vacancy Clusters in HTCVD Grown SiC

Aavikko, R. / Saarinen, K. / Magnusson, B. et al. | British Library Online Contents | 2005

Computational Analysis of SiC HTCVD from Silicon Tetrachloride and Propane

Makarov, Y.N. / Talalaev, R.A. / Vorob ev, A.N. et al. | British Library Online Contents | 2009