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Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Sundqvist, B. / Ellison, A. / Jonsson, A. / Henry, A. / Hallin, C. / Bergman, J. P. / Magnusson, B. / Janzen, E.

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Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Sundqvist, B. / Ellison, A. / Jonsson, A. / Henry, A. / Hallin, C. / Bergman, J. P. / Magnusson, B. / Janzen, E.

Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Sundqvist, B. / Ellison, A. / Jonsson, A. / Henry, A. / Hallin, C. / Bergman, J. P. / Magnusson, B. / Janzen, E.

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Title:

Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Contributors:

Sundqvist, B. (author) / Ellison, A. (author) / Jonsson, A. (author) / Henry, A. (author) / Hallin, C. (author) / Bergman, J. P. (author) / Magnusson, B. (author) / Janzen, E. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 21-24

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ellison, A. / Magnusson, B. / Son, N. T. et al. | British Library Online Contents | 2003

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