Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy: Fid-Bau Portal

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. / Trunek, A. J. / Huang, X. / Vetter, W. M. / Dudley, M. / Skowronski, M. / Liu, J.

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Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. / Trunek, A. J. / Huang, X. / Vetter, W. M. / Dudley, M. / Skowronski, M. / Liu, J.

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. / Trunek, A. J. / Huang, X. / Vetter, W. M. / Dudley, M. / Skowronski, M. / Liu, J.

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Title:

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Contributors:

Neudeck, P. G. (author) / Powell, J. A. (author) / Spry, D. J. (author) / Trunek, A. J. (author) / Huang, X. (author) / Vetter, W. M. (author) / Dudley, M. (author) / Skowronski, M. (author) / Liu, J. (author) / Bergman, P.

Published in:

Silicon Carbide and Related Materials 2002 ; 213-216

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Du, H. / Skowronski, M. / Neudeck, P. G. et al. | British Library Online Contents | 2006

High Breakdown Field p-Type 3C-SiC Schottky Diodes Grown on Step-Free 4H-SiC Mesas

Spry, D. J. / Trunek, A. J. / Neudeck, P. G. | British Library Online Contents | 2004

Step Structures Produced by Hydrogen Etching of Initially Step-Free (0001) 4H-SiC Mesas

Powell, J. A. / Neudeck, P. G. / Trunek, A. J. et al. | British Library Online Contents | 2005

Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers

Neudeck, P. G. / Powell, J. A. / Trunek, A. J. et al. | British Library Online Contents | 2004

Growth of Defect-Free 3C-SiC on 4H- and 6H-SiC Mesas Using Step-Free Surface Heteroepitaxy

Neudeck, P. G. / Powell, J. A. / Trunek, A. J. et al. | British Library Online Contents | 2002