Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas: Fid-Bau Portal

Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas

Du, H. / Skowronski, M. / Neudeck, P. G. / Trunek, A. J. / Spry, D. J. / Powell, J. A.

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Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas

Du, H. / Skowronski, M. / Neudeck, P. G. / Trunek, A. J. / Spry, D. J. / Powell, J. A.

Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas

Du, H. / Skowronski, M. / Neudeck, P. G. / Trunek, A. J. / Spry, D. J. / Powell, J. A.

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Title:

Relaxation Mechanism of the Defect-Free 3C-SiC Epitaxial Films Grown on Step-Free 4H SiC Mesas

Contributors:

Du, H. ( author ) / Skowronski, M. ( author ) / Neudeck, P. G. ( author ) / Trunek, A. J. ( author ) / Spry, D. J. ( author ) / Powell, J. A. ( author ) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 279-282

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Myers-Ward, R.L. / Nyakiti, L.O. / Hite, J.K. et al. | British Library Online Contents | 2011

Growth of Defect-Free 3C-SiC on 4H- and 6H-SiC Mesas Using Step-Free Surface Heteroepitaxy

Neudeck, P. G. / Powell, J. A. / Trunek, A. J. et al. | British Library Online Contents | 2002

High Breakdown Field p-Type 3C-SiC Schottky Diodes Grown on Step-Free 4H-SiC Mesas

Spry, D. J. / Trunek, A. J. / Neudeck, P. G. | British Library Online Contents | 2004

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. et al. | British Library Online Contents | 2003

Step Structures Produced by Hydrogen Etching of Initially Step-Free (0001) 4H-SiC Mesas

Powell, J. A. / Neudeck, P. G. / Trunek, A. J. et al. | British Library Online Contents | 2005