Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy: Fid-Bau Portal

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. / Trunek, A. J. / Huang, X. / Vetter, W. M. / Dudley, M. / Skowronski, M. / Liu, J.

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Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. / Trunek, A. J. / Huang, X. / Vetter, W. M. / Dudley, M. / Skowronski, M. / Liu, J.

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Neudeck, P. G. / Powell, J. A. / Spry, D. J. / Trunek, A. J. / Huang, X. / Vetter, W. M. / Dudley, M. / Skowronski, M. / Liu, J.

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Titel:

Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

Beteiligte:

Neudeck, P. G. (Autor:in) / Powell, J. A. (Autor:in) / Spry, D. J. (Autor:in) / Trunek, A. J. (Autor:in) / Huang, X. (Autor:in) / Vetter, W. M. (Autor:in) / Dudley, M. (Autor:in) / Skowronski, M. (Autor:in) / Liu, J. (Autor:in) / Bergman, P.

Erschienen in:

Silicon Carbide and Related Materials 2002 ; 213-216

MATERIALS SCIENCE FORUM ; 433/436

Erscheinungsdatum:

01.01.2003

Format / Umfang:

4 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

Du, H. / Skowronski, M. / Neudeck, P. G. et al. | British Library Online Contents | 2006

High Breakdown Field p-Type 3C-SiC Schottky Diodes Grown on Step-Free 4H-SiC Mesas

Spry, D. J. / Trunek, A. J. / Neudeck, P. G. | British Library Online Contents | 2004

Step Structures Produced by Hydrogen Etching of Initially Step-Free (0001) 4H-SiC Mesas

Powell, J. A. / Neudeck, P. G. / Trunek, A. J. et al. | British Library Online Contents | 2005

Step Free Surface Heteroepitaxy of 3C-SiC Layers on Patterned 4H/6H-SiC Mesas and Cantilevers

Neudeck, P. G. / Powell, J. A. / Trunek, A. J. et al. | British Library Online Contents | 2004

Growth of Defect-Free 3C-SiC on 4H- and 6H-SiC Mesas Using Step-Free Surface Heteroepitaxy

Neudeck, P. G. / Powell, J. A. / Trunek, A. J. et al. | British Library Online Contents | 2002

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