Delamination of Thin Layers in H^+ Implanted Silicon Carbide: Fid-Bau Portal

Delamination of Thin Layers in H^+ Implanted Silicon Carbide

Hara, T. / Kakizaki, Y. / Tanaka, H. / Inoue, M. / Kajiyama, K. / Yoneda, T. / Sekine, K. / Masao, K.

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Delamination of Thin Layers in H^+ Implanted Silicon Carbide

Hara, T. / Kakizaki, Y. / Tanaka, H. / Inoue, M. / Kajiyama, K. / Yoneda, T. / Sekine, K. / Masao, K.

Delamination of Thin Layers in H^+ Implanted Silicon Carbide

Hara, T. / Kakizaki, Y. / Tanaka, H. / Inoue, M. / Kajiyama, K. / Yoneda, T. / Sekine, K. / Masao, K.

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Title:

Delamination of Thin Layers in H^+ Implanted Silicon Carbide

Contributors:

Hara, T. (author) / Kakizaki, Y. (author) / Tanaka, H. (author) / Inoue, M. (author) / Kajiyama, K. (author) / Yoneda, T. (author) / Sekine, K. (author) / Masao, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 264/268 ; 771-774

Publication date:

1998-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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