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Structural and electrical characterization of epitaxial 4H-SiC layers for power electronic device applications

Scaltrito, L. / Porro, S. / Cocuzza, M. / Giorgis, F. / Pirri, C. F. / Mandracci, P. / Ricciardi, C. / Ferrero, S. / Sgorlon, C. / Richieri, G.

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Structural and electrical characterization of epitaxial 4H-SiC layers for power electronic device applications

Scaltrito, L. / Porro, S. / Cocuzza, M. / Giorgis, F. / Pirri, C. F. / Mandracci, P. / Ricciardi, C. / Ferrero, S. / Sgorlon, C. / Richieri, G.

Structural and electrical characterization of epitaxial 4H-SiC layers for power electronic device applications

Scaltrito, L. / Porro, S. / Cocuzza, M. / Giorgis, F. / Pirri, C. F. / Mandracci, P. / Ricciardi, C. / Ferrero, S. / Sgorlon, C. / Richieri, G.

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Document information

Title:

Structural and electrical characterization of epitaxial 4H-SiC layers for power electronic device applications

Contributors:

Scaltrito, L. (author) / Porro, S. (author) / Cocuzza, M. (author) / Giorgis, F. (author) / Pirri, C. F. (author) / Mandracci, P. (author) / Ricciardi, C. (author) / Ferrero, S. (author) / Sgorlon, C. (author) / Richieri, G. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 298-303

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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