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Thermal cycling response of layered gold/polysilicon MEMS structures
Thermal cycling response of layered gold/polysilicon MEMS structures
Thermal cycling response of layered gold/polysilicon MEMS structures
Gall, K. (author) / Dunn, M. L. (author) / Zhang, Y. (author) / Corff, B. A. (author)
MECHANICS OF MATERIALS ; 36 ; 45-55
2004-01-01
11 pages
Article (Journal)
English
DDC:
620.11
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