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Thermal decomposition of dimethylaluminum isopropoxide on Si(1 0 0)

Lee, S. Y. / Luo, B. / Sun, Y. / White, J. M. / Kim, Y.

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Thermal decomposition of dimethylaluminum isopropoxide on Si(1 0 0)

Lee, S. Y. / Luo, B. / Sun, Y. / White, J. M. / Kim, Y.

Thermal decomposition of dimethylaluminum isopropoxide on Si(1 0 0)

Lee, S. Y. / Luo, B. / Sun, Y. / White, J. M. / Kim, Y.

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Order at Subito €

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Document information

Title:

Thermal decomposition of dimethylaluminum isopropoxide on Si(1 0 0)

Contributors:

Lee, S. Y. (author) / Luo, B. (author) / Sun, Y. (author) / White, J. M. (author) / Kim, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 222 ; 234-242

Publication date:

2004-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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