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Positron Beam Study of Defects Induced in Ar-Implanted Si
Positron Beam Study of Defects Induced in Ar-Implanted Si
Positron Beam Study of Defects Induced in Ar-Implanted Si
Miyagoe, T. (author) / Fujinami, M. (author) / Sawada, T. (author) / Suzuki, R. (author) / Ohdaira, T. (author) / Akahane, T. (author)
MATERIALS SCIENCE FORUM ; 445/446 ; 150-152
2004-01-01
3 pages
Article (Journal)
English
DDC:
620.11
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