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Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

Myung, H. S. / Park, Y. S. / Jung, M. J. / Hong, B. / Han, J. G.

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Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

Myung, H. S. / Park, Y. S. / Jung, M. J. / Hong, B. / Han, J. G.

Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

Myung, H. S. / Park, Y. S. / Jung, M. J. / Hong, B. / Han, J. G.

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Order at Subito €

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Document information

Title:

Synthesis and mechanical properties of amorphous carbon films by closed-field unbalanced magnetron sputtering

Contributors:

Myung, H. S. (author) / Park, Y. S. (author) / Jung, M. J. (author) / Hong, B. (author) / Han, J. G. (author)

Published in:

MATERIALS LETTERS ; 58 ; 1513-1516

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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