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    Effect of deposition temperature on the characteristics of hafnium oxide films deposited by metalorganic chemical vapor deposition using amide precursor

    New search for: Takahashi, K.
    New search for: Funakubo, H.
    New search for: Hino, S.
    New search for: Nakayama, M.
    New search for: Ohashi, N.
    New search for: Kiguchi, T.
    New search for: Tokumitsu, E.

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    Effect of deposition temperature on the characteristics of hafnium oxide films deposited by metalorganic chemical vapor deposition using amide precursor

    New search for: Takahashi, K.
    New search for: Funakubo, H.
    New search for: Hino, S.
    New search for: Nakayama, M.
    New search for: Ohashi, N.
    New search for: Kiguchi, T.
    New search for: Tokumitsu, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of deposition temperature on the characteristics of hafnium oxide films deposited by metalorganic chemical vapor deposition using amide precursor

    New search for: Takahashi, K.
    New search for: Funakubo, H.
    New search for: Hino, S.
    New search for: Nakayama, M.
    New search for: Ohashi, N.
    New search for: Kiguchi, T.
    New search for: Tokumitsu, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effect of deposition temperature on the characteristics of hafnium oxide films deposited by metalorganic chemical vapor deposition using amide precursor

    Contributors:

    Takahashi, K. (author) / Funakubo, H. (author) / Hino, S. (author) / Nakayama, M. (author) / Ohashi, N. (author) / Kiguchi, T. (author) / Tokumitsu, E. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 584-589

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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