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    Characterization of Ge gradients in SiGe HBTs by AES depth profile simulation

    New search for: Kruger, D.
    New search for: Penkov, A.
    New search for: Yamamoto, Y.
    New search for: Goryachko, A.
    New search for: Tillack, B.

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    Characterization of Ge gradients in SiGe HBTs by AES depth profile simulation

    New search for: Kruger, D.
    New search for: Penkov, A.
    New search for: Yamamoto, Y.
    New search for: Goryachko, A.
    New search for: Tillack, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of Ge gradients in SiGe HBTs by AES depth profile simulation

    New search for: Kruger, D.
    New search for: Penkov, A.
    New search for: Yamamoto, Y.
    New search for: Goryachko, A.
    New search for: Tillack, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characterization of Ge gradients in SiGe HBTs by AES depth profile simulation

    Contributors:

    Kruger, D. (author) / Penkov, A. (author) / Yamamoto, Y. (author) / Goryachko, A. (author) / Tillack, B. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 224 ; 51-54

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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