Base doping and dopant profile control of SiGe npn and pnp HBTs: Fid-Bau Portal

Base doping and dopant profile control of SiGe npn and pnp HBTs

Tillack, B. / Heinemann, B. / Knoll, D. / Rucker, H. / Yamamoto, Y.

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Base doping and dopant profile control of SiGe npn and pnp HBTs

Tillack, B. / Heinemann, B. / Knoll, D. / Rucker, H. / Yamamoto, Y.

Base doping and dopant profile control of SiGe npn and pnp HBTs

Tillack, B. / Heinemann, B. / Knoll, D. / Rucker, H. / Yamamoto, Y.

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Check availability in my library

Order at Subito €

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Document information

Title:

Base doping and dopant profile control of SiGe npn and pnp HBTs

Contributors:

Tillack, B. (author) / Heinemann, B. (author) / Knoll, D. (author) / Rucker, H. (author) / Yamamoto, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6013-6016

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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