Segregation of boron to polycrystalline and single-crystal Si1-x-yGexCy and Si1-yCy layers: Fid-Bau Portal

Segregation of boron to polycrystalline and single-crystal Si1-x-yGexCy and Si1-yCy layers

Stewart, E. J. / Sturm, J. C.

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Segregation of boron to polycrystalline and single-crystal Si1-x-yGexCy and Si1-yCy layers

Stewart, E. J. / Sturm, J. C.

Segregation of boron to polycrystalline and single-crystal Si1-x-yGexCy and Si1-yCy layers

Stewart, E. J. / Sturm, J. C.

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Document information

Title:

Segregation of boron to polycrystalline and single-crystal Si1-x-yGexCy and Si1-yCy layers

Contributors:

Stewart, E. J. (author) / Sturm, J. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 87-90

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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