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Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Muto, D. / Sakuraba, M. / Seino, T. / Murota, J.

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Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Muto, D. / Sakuraba, M. / Seino, T. / Murota, J.

Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Muto, D. / Sakuraba, M. / Seino, T. / Murota, J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

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Document information

Title:

Ar plasma irradiation effects in atomically controlled Si epitaxial growth

Contributors:

Muto, D. (author) / Sakuraba, M. (author) / Seino, T. (author) / Murota, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 210-214

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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