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Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

Brabant, P. / Wen, J. / Italiano, J. / Landin, T. / Cody, N. / Haen, L.

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Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

Brabant, P. / Wen, J. / Italiano, J. / Landin, T. / Cody, N. / Haen, L.

Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

Brabant, P. / Wen, J. / Italiano, J. / Landin, T. / Cody, N. / Haen, L.

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Check availability in my library

Order at Subito €

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Document information

Title:

Achieving a SiGe HBT epitaxial emitter with novel low thermal budget technique

Contributors:

Brabant, P. (author) / Wen, J. (author) / Italiano, J. (author) / Landin, T. (author) / Cody, N. (author) / Haen, L. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 347-349

Publication date:

2004-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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