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Low thermal budget surface preparation of Si and SiGe

Abbadie, A. / Hartmann, J. M. / Holliger, P. / Semeria, M. N. / Besson, P. / Gentile, P.

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Low thermal budget surface preparation of Si and SiGe

Abbadie, A. / Hartmann, J. M. / Holliger, P. / Semeria, M. N. / Besson, P. / Gentile, P.

Low thermal budget surface preparation of Si and SiGe

Abbadie, A. / Hartmann, J. M. / Holliger, P. / Semeria, M. N. / Besson, P. / Gentile, P.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Low thermal budget surface preparation of Si and SiGe

Contributors:

Abbadie, A. (author) / Hartmann, J. M. (author) / Holliger, P. (author) / Semeria, M. N. (author) / Besson, P. (author) / Gentile, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 225 ; 256-266

Publication date:

2004-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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