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Investigations on hardness of rf sputter deposited SiCN thin films

Sundaram, K. B. / Alizadeh, Z. / Todi, R. M. / Desai, V. H.

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Investigations on hardness of rf sputter deposited SiCN thin films

Sundaram, K. B. / Alizadeh, Z. / Todi, R. M. / Desai, V. H.

Investigations on hardness of rf sputter deposited SiCN thin films

Sundaram, K. B. / Alizadeh, Z. / Todi, R. M. / Desai, V. H.

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Order at Subito €

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Document information

Title:

Investigations on hardness of rf sputter deposited SiCN thin films

Contributors:

Sundaram, K. B. (author) / Alizadeh, Z. (author) / Todi, R. M. (author) / Desai, V. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 368 ; 103-108

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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