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Epitaxial ZnO films grown by RF-assisted low-temperature CVD method

Ataev, B. M. / Mamedov, V. V. / Omaev, A. K. / Magomedov, B. A.

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Epitaxial ZnO films grown by RF-assisted low-temperature CVD method

Ataev, B. M. / Mamedov, V. V. / Omaev, A. K. / Magomedov, B. A.

Epitaxial ZnO films grown by RF-assisted low-temperature CVD method

Ataev, B. M. / Mamedov, V. V. / Omaev, A. K. / Magomedov, B. A.

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Check availability in my library

Order at Subito €

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Document information

Title:

Epitaxial ZnO films grown by RF-assisted low-temperature CVD method

Contributors:

Ataev, B. M. (author) / Mamedov, V. V. (author) / Omaev, A. K. (author) / Magomedov, B. A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 535-537

Publication date:

2003-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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